About: http://webisa.webdatacommons.org/241404584

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, silicon carbide can be deposited onto a substrate by recombination of plasmas generated from silane (SiH4) and an organic material, such as methane or xylene.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com