About: http://webisa.webdatacommons.org/241629384

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, one of the problems in identifying with precision the wafers which should be inspected for defects is that the in-situ particle monitor 18 provides too much data.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de