About: http://webisa.webdatacommons.org/241636088

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	To do the SiO2 or Si3N4, it is possible to start with a silicon target which is lightly doped with a metal, such as aluminium, in order to make it sufficiently conductive.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es