| http://www.w3.org/ns/prov#value | - of Al, Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, W, and Si with a halide-containing reactant selected from the group consisting of X.sub.2, HX, M'X.sub.a, and M'X.sub.(a-b) H.sub.b, wherein X is F, Cl, Br, or I, M' is a metal M, Pb, Ge, Ag, Sn, Ga, In, Cu, Se, or a
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