About: http://webisa.webdatacommons.org/241658658

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, since the etching of the pad silicon nitride layer is an isotropic etch, the larger the pulling-back, the thinner the remaining pad silicon nitride layer will be.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr