About: http://webisa.webdatacommons.org/242011184

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Although the Penfold et al. device was an advancement in the field, its efficient use was limited to the sputtering of long cylindrical substrates such as wires or optical fibers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr