About: http://webisa.webdatacommons.org/242175720

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A workpiece such as a semiconductor wafer held by the top ring 75 is polished in the same manner as FIG. 2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es