About: http://webisa.webdatacommons.org/242217122

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In another aspect, a polishing article is provided for processing a substrate surface, such as a conductive layer deposited on the substrate surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com