About: http://webisa.webdatacommons.org/242359230

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In terms of the effects of the present invention and absorption of the exposure radiation such as an ArF excimer laser, a phenyl group is preferable.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com