About: http://webisa.webdatacommons.org/242387216

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this case, the ions of impurity such as P and B are obtained frequently by transforming the gas containing dopant elements such as PH3 and B2 H6 into plasma by high frequency discharge and the like similarly to the plasma doping.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es