About: http://webisa.webdatacommons.org/242468944

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In addition, since the reaction between the ClF3 gas and the films or the like is an exothermic reaction, this heat generation more accelerates the reaction of the ClF3 gas, so that deposits such as films can be effectively removed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com