About: http://webisa.webdatacommons.org/242468946

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In addition, since the reaction between the ClF3 gas and the films or the like is a exothermic reaction, this heat generation more accelerates the reaction of the ClF3 gas, so that deposits such as a film can be effectively removed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com