About: http://webisa.webdatacommons.org/242696084

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the next step, the surface of the resin layer is selectively exposed through a desired mask pattern to an energy beam such as an X-ray, visible light, infrared radiation, ultraviolet radiation or an electron beam (exposure step).
http://www.w3.org/ns/prov#wasQuotedFrom	google.de