About: http://webisa.webdatacommons.org/242722432

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the fabrication of a semiconductor device, various semiconductor processing apparatuses are used to perform processes, such as film formation, etching, oxidation, and diffusion, on a target substrate, e.g., a semiconductor wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com