About: http://webisa.webdatacommons.org/242723409

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the preferred embodiment, this membrane is a flexing membrane constructed from a metal such as aluminum or semiconductor material such as silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com