About: http://webisa.webdatacommons.org/242728179

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An NPN protective oxide is then deposited over the surface 76 of the wafer, and a protect nitride resist (PX) is deposited and removed, except over oxide region 70 a and a portion of the adjacent shallow trench isolation regions 32.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com