About: http://webisa.webdatacommons.org/242922169

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A film thickness of the lower resist layer is preferably from 0.1 to 4.0 ??m, more preferably from 0.2 to 2.0 ??m, and especially preferably from 0.25 to 1.5 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com