About: http://webisa.webdatacommons.org/24313983

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Such processing systems can be used for a variety of semiconductor processing applications such as etching, deposition, resist stripping, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com