| http://www.w3.org/ns/prov#value | - In an exemplary embodiment, the raw material 108 may be ultra fine yttrium containing particles such as yttrium oxide (Y2O3) particles, bulk yttrium (Y) particles, or yttrium (Y) alloy, having an average diameter between about 0.05 ??m and about 3 ??m, for example less than 2 ??m, such as 1 ??m.
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