About: http://webisa.webdatacommons.org/243285520

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In particular, the present invention is extremely useful because even in the case of manufacturing semiconductor chips that are extremely thin in thickness such as 50 ??m or less, a similar effect can be obtained.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com