About: http://webisa.webdatacommons.org/243341051

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the first to sixth embodiments, purge gas made of inert gas such as nitrogen, helium, or argon is supplied through each nozzle.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es