About: http://webisa.webdatacommons.org/24349697

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	During processing, a heat conductive fluid, such as helium gas, hydrogen gas and the like, are fed at selected pressures to each of the zones.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com