About: http://webisa.webdatacommons.org/243710889

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Due to the fast response time of the arc lamp 54, the total duration of the notch mandated by block 180 is negligible compared to the time constant for thermal properties of the workpiece 34 which in this embodiment is a silicon wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com