About: http://webisa.webdatacommons.org/244091092

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	a first silicon oxide film disposed in a region other than a region in which the electrode is disposed, the first silicon oxide film having a film thickness substantially equal to a thickness of the electrode; and
http://www.w3.org/ns/prov#wasQuotedFrom	google.com