About: http://webisa.webdatacommons.org/244289064

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	According to the present invention, the lateral wall 10 of the plasma chamber 1 is made of a conductive material, such as metal.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com