About: http://webisa.webdatacommons.org/24441850

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Our current developments will allow users to simulate complex 3D topographical stacks for advanced 3D packaging, MEMS, and other applications.
http://www.w3.org/ns/prov#wasQuotedFrom	spie.org