About: http://webisa.webdatacommons.org/244457009

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a graph illustrating that uniform coating of wafers is achieved with spin chucks that are coated with dielectric materials and have a reduced number of wafer-to-chuck support structures.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au