About: http://webisa.webdatacommons.org/244509615

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1A is a schematic cross sectional view of a portion of a semiconductor wafer of a prior art, after HDP fill.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es