About: http://webisa.webdatacommons.org/24462592

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Substrate 12 is composed of a semiconductor material, preferably silicon (Si) or a compound including silicon and germanium (SiGe) formed to have a substantially planar surface 14 in an area laterally adjacent to the gate 16.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com