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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 17 is a flow chart illustrating the individual substeps of a first-degree-of-influence calculating step in the method of monitoring manufacturing apparatus according to the fourth embodiment;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com