About: http://webisa.webdatacommons.org/244737733

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	depositing an oxide layer and a second nitride layer on exposed surfaces of the first nitride layer, the pad oxide layer and the substrate including the trench;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com