About: http://webisa.webdatacommons.org/244853146

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Additionally, a capping layer including tantalum nitride may be formed on the second electrode.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com