About: http://webisa.webdatacommons.org/24495071

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Such undue clamping forces may require moving parts such as bearings or slides to minimize particle generation upon engagement with the wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com