About: http://webisa.webdatacommons.org/245864302

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The interlevel dielectric layer 188 is formed of a material such as boroposphosilicate glass (BPSG) or undoped silicate glass (USG).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com