About: http://webisa.webdatacommons.org/245873156

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This layer can be formed using methods including but not limited to chemical vapor deposition (CVD), or plasma enhanced CVD (PECVD).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com