About: http://webisa.webdatacommons.org/246110008

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The path is in part defined by an arcuate track, in turn including means for independently rotating the wafer at the scrub stations.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com