About: http://webisa.webdatacommons.org/246145575

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 15, wherein said third conducting layer is a material selected from the group consisting of tungsten and titanium nitride, and is deposited to a thickness of between about 500 and 1500 Angstroms.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com