PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Therefore, an object of the invention is a method of obtaining a thin film from a substrate of semiconductor material, the thin film including at least one element in a different material from that of said semiconductor material, produced on one face of the substrate and conferring on the thin film a heterogeneous structure, characterised in that it includes the following steps:
http://www.w3.org/ns/prov#wasQuotedFrom
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