About: http://webisa.webdatacommons.org/2461903

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, the inventors think that there is a limit to controlling the line width of the resist pattern in such a way, no matter how strictly the formation conditions of the resist pattern may be set.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com