About: http://webisa.webdatacommons.org/246316068

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the information, such as lot ID, is retrieved by a RFID interrogator associated with a processing tool, an automatic transport device may be activated to load a corresponding wafer lot onto the processing tool.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr