About: http://webisa.webdatacommons.org/246566767

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The microscanning mask 20 should have good mechanical rigidity and stability such as can be obtained with the use of an optical substrate of a material that provides good optical transmission and minimal distortion.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au