About: http://webisa.webdatacommons.org/246752897

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The beam structural layer and the sacrificial layer may be fabricated with materials other than silicon nitride and silicon dioxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com