About: http://webisa.webdatacommons.org/246787799

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The etching is carried out utilizing any dry etching process such as reactive-ion etching (RIE), plasma-etching or ion beam etching.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es