About: http://webisa.webdatacommons.org/246882240

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The lower and upper conductive lines 71 and 80 are formed from a conductive material such as doped-polysilicon Poly-Si or tungsten T, and substrate is made from a compound such as silicon or gallium arsenide (GaAs).
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr