| http://www.w3.org/ns/prov#value | - The ultrasonic sensor 5 constructed in the layer construction 20 in the embodiment in accordance with FIG. 3 is used at temperatures of at least 200??? C., preferably at temperatures of between 250??? C. and 950??? C. The piezoelectric layer 23 is produced from a material such as ZnO, for example.
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