About: http://webisa.webdatacommons.org/246957611

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The silicon oxide film can be deposited by PECVD, LPCVD, physical vapor deposition such as sputtering, or another deposition method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com