| http://www.w3.org/ns/prov#value | - There would be little reason to use this mode unless there were a good reason to believe that the actual wafer topology is indeed a parallel plane and that the largest focus error to be corrected is due to focus Mode 2: Two non-collocated focus measurements can be used to fit a tilted plane that contains the 2 measured focus heights, but is otherwise parallel to the focal plane.
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