About: http://webisa.webdatacommons.org/247158160

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	By using this resist pattern, the polyimide layer 20 is patterned into such a shape as to cover the area in which the spirally-shaped coil 18 is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com