About: http://webisa.webdatacommons.org/247380900

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Furthermore, since these ceramics are composed of elements such as aluminum (Al), silicon (Si), oxygen (O) and nitrogen (N), wafers are not adversely affected.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com