About: http://webisa.webdatacommons.org/247542205

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A device which can be produced with such an exposure apparatus may be a semiconductor chip such as an LSI or a VLSI, a CCD, a magnetic sensor or a liquid crystal device.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com